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Intense x-ray generation in 1.053, 0.53, 0.26 µm laser-produced plasma has been investigated in the photon energy range of 0.1 to 3keV. The x-ray spectrum is found to have several humps which move to the higher energy side as the atomic number of the target increases. This atomic number dependence is explained by a semi-Moseley's law and allows us to predict a target material most suitable for generating the photons of desired energies. Conversion efficiencies of 1.5 rk, 3keV x-rays are obtained also as a function of laser wavelength at the intensity of 1013 W/cm2. The conversion efficiency of keV x rays has been enhanced by a factor of 2 % 3 with a controlled prepulse laser. From the semi-Moseley's law we find that cryogenic targets using either Xe or Kr in a liquid or solid phase may be most useful for a number of applications because they radiate 1 % 3 keV x rays efficiently and never deposit on the x-ray optical components and the objects to be exposed.
T. Mochizuki andC. Yamanaka
"Efficient Soft X-Ray Generation In Short Wavelength Laser Produced Plasmas", Proc. SPIE 0733, Soft X-Ray Optics and Technology, (1 January 1986); https://doi.org/10.1117/12.964886
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T. Mochizuki, C. Yamanaka, "Efficient Soft X-Ray Generation In Short Wavelength Laser Produced Plasmas," Proc. SPIE 0733, Soft X-Ray Optics and Technology, (1 January 1986); https://doi.org/10.1117/12.964886