Soft X-Ray Imaging using CCD Sensors

Werner Meyer-Ilse

doi:10.1117/12.964955

1 January 1986 Soft X-Ray Imaging using CCD Sensors

Werner Meyer-Ilse

Proceedings Volume 0733, Soft X-Ray Optics and Technology; (1986) https://doi.org/10.1117/12.964955
Event: Soft X-Ray Optics and Technology, 1987, Berlin, Germany

Abstract

An imaging CCD (charge coupled device) camera system for soft x-ray detection has been constructed. A reasonable efficiency is achieved down to photon energies of 270 eV. The performance of a system applying a CCD is compared with other detection techniques, and the different ways to increase the performance of x-ray imaging with CCD's are discussed.

Citation Download Citation

Werner Meyer-Ilse "Soft X-Ray Imaging using CCD Sensors", Proc. SPIE 0733, Soft X-Ray Optics and Technology, (1 January 1986); https://doi.org/10.1117/12.964955

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