Laser Excited Synthesis Of Sub-Micron Powders

J. G. M. Becht; B. A. Bauer; P. J. van der Put; J. Schoonman; B. Scarlett

doi:10.1117/12.968919

16 January 1988 Laser Excited Synthesis Of Sub-Micron Powders

J. G. M. Becht, B. A. Bauer, P. J. van der Put, J. Schoonman, B. Scarlett

Proceedings Volume 0952, Laser Technologies in Industry; (1988) https://doi.org/10.1117/12.968919
Event: Laser Technologies in Industry, 1988, Porto, Portugal

Abstract

The laser activated synthesis of silicon and silicon nitride powders has been studied using gaseous reactants. The use of non-IR-absorbing, chlorinated silanes requires the application of a sensitizer, which transfers the thermal energy to the reactants. The influence of the sensitizer sulphur hexafluoride on the laser activated reactions of dichloro silane and silicon tetrachloride in the presence of ammonia has been studied.

Citation Download Citation

J. G. M. Becht, B. A. Bauer, P. J. van der Put, J. Schoonman, and B. Scarlett "Laser Excited Synthesis Of Sub-Micron Powders", Proc. SPIE 0952, Laser Technologies in Industry, (16 January 1988); https://doi.org/10.1117/12.968919

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