Effect of process parameters on surface morphology in MRF

Aric Shorey

doi:10.1117/12.2284013

19 May 2003 Effect of process parameters on surface morphology in MRF

Aric Shorey

Author Affiliations +

Proceedings Volume 10314, Optifab 2003: Technical Digest; 103140O (2003) https://doi.org/10.1117/12.2284013
Event: OptiFab 2003, 2003, Rochester, NY, United States

Abstract

Spot surface morphology can be considered as a footprint of the removal process in magnetorheological finishing (MRF). When properly processed, it can account for the performance of the MR fluid in polishing. Experiments were done using different conditions to vary removal rate and evaluate the resulting effect on microroughness and the overall spot surface morphology. Such experiments have been performed on two optical glasses, with several different MR fluids and a wide range of machine parameter settings. Atomic force microscope (AFM) measurements show that the surface morphology has a strong dependence on the abrasive type in the MR fluid. Interferometry measurements show that the roughness inside the spot increases with the rate of the material removal.

Citation Download Citation

Aric Shorey "Effect of process parameters on surface morphology in MRF", Proc. SPIE 10314, Optifab 2003: Technical Digest, 103140O (19 May 2003); https://doi.org/10.1117/12.2284013

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