All dielectric metasurface nano-fabrication based on TiO2 phase shifters

Jeong Yub Lee; Jaekwan Kim; Kiyeon Yang; Yongsung Kim; Byonggwon Song; Jaeduck Jang; Soohwan Sul; Chang Seung Lee

doi:10.1117/12.2272148

31 August 2017 All dielectric metasurface nano-fabrication based on TiO₂ phase shifters

Jeong Yub Lee, Jaekwan Kim, Kiyeon Yang, Yongsung Kim, Byonggwon Song, Jaeduck Jang, Soohwan Sul, Chang Seung Lee

Proceedings Volume 10354, Nanoengineering: Fabrication, Properties, Optics, and Devices XIV; 103540I (2017) https://doi.org/10.1117/12.2272148
Event: SPIE Nanoscience + Engineering, 2017, San Diego, California, United States

Abstract

All dielectric metasurface of low loss TiO₂ in visible wavelengths was devised forming subwavelength-scale nanostructures. DC-magnetron sputtering of oxygen-reduced TiOx (x<;2) target with reactive oxygen gas made dense amorphous TiO₂ layers of 1.35nm Ra. A 380nm-thick TiO₂ has low extinction coefficient (k) under 1x10^-5, transparency of 98.33% and high refractive index (n) of 2.55 at 485nm wavelength. Highly precise TiO₂ meta-atoms were successfully defined with 100nm-300nm feature size. Phase shift properties of TiO₂ metasurface were measured. Finally, we constructed dielectric metaphotonic platform for various optical devices such as band pass filters, flat lens and beam deflectors in visible ranges.

Citation Download Citation

Jeong Yub Lee, Jaekwan Kim, Kiyeon Yang, Yongsung Kim, Byonggwon Song, Jaeduck Jang, Soohwan Sul, and Chang Seung Lee "All dielectric metasurface nano-fabrication based on TiO₂ phase shifters", Proc. SPIE 10354, Nanoengineering: Fabrication, Properties, Optics, and Devices XIV, 103540I (31 August 2017); https://doi.org/10.1117/12.2272148

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