Expansion of measurement area of three-dimensional deformation measurement speckle interferometry with same sensitivities in three directions under consideration of measurement sensitivity

Y. Arai

doi:10.1117/12.2270733

23 August 2017 Expansion of measurement area of three-dimensional deformation measurement speckle interferometry with same sensitivities in three directions under consideration of measurement sensitivity

Y. Arai

Author Affiliations +

Proceedings Volume 10373, Applied Optical Metrology II; 1037305 (2017) https://doi.org/10.1117/12.2270733
Event: SPIE Optical Engineering + Applications, 2017, San Diego, California, United States

Abstract

A novel in-plane and out-of-plane deformation simultaneous measurement method using only two speckle patterns grabbed before and after deformation of an object with rough surfaces has been proposed. Then, the same measurement sensitivities in three directions can be set in this system. However, the method has some area which cannot measure a deformation. In this paper, new optical system which is not based on orthogonal laser beams is proposed to expand the measurement area of the method under consideration of measurement sensitivity. The improvement of deformation measurement area where the deformation distribution cannot be measured by the conventional optical system is discussed in the proposed method.

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Y. Arai "Expansion of measurement area of three-dimensional deformation measurement speckle interferometry with same sensitivities in three directions under consideration of measurement sensitivity", Proc. SPIE 10373, Applied Optical Metrology II, 1037305 (23 August 2017); https://doi.org/10.1117/12.2270733

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