A new ultra-high-accuracy angle generator: current status and future direction

Christian F. Guertin; Ralf D. Geckeler

doi:10.1117/12.2274143

7 September 2017 A new ultra-high-accuracy angle generator: current status and future direction

Christian F. Guertin, Ralf D. Geckeler

Proceedings Volume 10385, Advances in Metrology for X-Ray and EUV Optics VII; 103850A (2017) https://doi.org/10.1117/12.2274143
Event: SPIE Optical Engineering + Applications, 2017, San Diego, California, United States

Abstract

Lack of an extreme high-accuracy angular positioning device available in the United States has left a gap in industrial and scientific efforts conducted there, requiring certain user groups to undertake time-consuming work with overseas laboratories. Specifically, in x-ray mirror metrology the global research community is advancing the state-of-the-art to unprecedented levels. We aim to fill this U.S. gap by developing a versatile high-accuracy angle generator as a part of the national metrology tool set for x-ray mirror metrology and other important industries. Using an established calibration technique to measure the errors of the encoder scale graduations for full-rotation rotary encoders, we implemented an optimized arrangement of sensors positioned to minimize propagation of calibration errors. Our initial feasibility research shows that upon scaling to a full prototype and including additional calibration techniques we can expect to achieve uncertainties at the level of 0.01 arcsec (50 nrad) or better and offer the immense advantage of a highly automatable and customizable product to the commercial market.

Conference Presentation

Citation Download Citation

Christian F. Guertin and Ralf D. Geckeler "A new ultra-high-accuracy angle generator: current status and future direction", Proc. SPIE 10385, Advances in Metrology for X-Ray and EUV Optics VII, 103850A (7 September 2017); https://doi.org/10.1117/12.2274143

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