Testing the limits of the Stoney Equation for assessing stress in thin films from interferometric wavefront deformation measurements

E. Jankowska; Yang Le; C. S. Menoni

doi:10.1117/12.2282278

13 November 2017 Testing the limits of the Stoney Equation for assessing stress in thin films from interferometric wavefront deformation measurements

E. Jankowska, Yang Le, C. S. Menoni

Author Affiliations +

Proceedings Volume 10447, Laser-Induced Damage in Optical Materials 2017; 104472E (2017) https://doi.org/10.1117/12.2282278
Event: SPIE Laser Damage, 2017, Boulder, Colorado, United States

Abstract

We describe an optical measurement technique based on Carrier Frequency Interferometry (CFI) that allows to measure wavefront deformation of coated optics with high accuracy. The sensitivity of the method is considerably greater than phase shifting interferometry. The limits of validity of the Stoney equation in calculating stress in thin films is assessed using CFI. The evolution of stress in Ta2O5 films deposited by ion beam sputtering is also evaluated.

Citation Download Citation

E. Jankowska, Yang Le, and C. S. Menoni "Testing the limits of the Stoney Equation for assessing stress in thin films from interferometric wavefront deformation measurements", Proc. SPIE 10447, Laser-Induced Damage in Optical Materials 2017, 104472E (13 November 2017); https://doi.org/10.1117/12.2282278

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