MEMS deformable mirror for wavefront correction of large telescopes

Sigmund Manhart; Gleb Vdovin; Neil Collings; Zoran Sodnik; Susanne Nikolov; Werner Hupfer

doi:10.1117/12.2307868

21 November 2017 MEMS deformable mirror for wavefront correction of large telescopes

Sigmund Manhart, Gleb Vdovin, Neil Collings, Zoran Sodnik, Susanne Nikolov, Werner Hupfer

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Proceedings Volume 10569, International Conference on Space Optics — ICSO 2000; 1056918 (2017) https://doi.org/10.1117/12.2307868
Event: International Conference on Space Optics 2000, 2000, Toulouse Labège, France

Abstract

A 50 mm diameter membrane mirror was designed and manufactured at TU Delft. It is made from bulk silicon by micromachining - a technology primarily used for micro-electromechanical systems (MEMS). The mirror unit is equipped with 39 actuator electrodes and can be electrostatically deformed to correct wavefront errors in optical imaging systems. Performance tests on the deformable mirror were carried out at Astrium GmbH using a breadboard setup with a wavefront sensor and a closed-loop control system. It was found that the deformable membrane mirror is well suited for correction of low order wavefront errors as they must be expected in lightweighted space telescopes.

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Sigmund Manhart, Gleb Vdovin, Neil Collings, Zoran Sodnik, Susanne Nikolov, and Werner Hupfer "MEMS deformable mirror for wavefront correction of large telescopes", Proc. SPIE 10569, International Conference on Space Optics — ICSO 2000, 1056918 (21 November 2017); https://doi.org/10.1117/12.2307868

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KEYWORDS

Mirrors

Wavefronts

Electrodes

Micromachined deformable membrane mirrors

Deformable mirrors

Microelectromechanical systems

Monochromatic aberrations

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