Green ethanol-developable electron beam lithography processes using positive tone biomass resist material

Satoshi Takei

doi:10.1117/12.2295145

19 March 2018 Green ethanol-developable electron beam lithography processes using positive tone biomass resist material

Satoshi Takei

Proceedings Volume 10584, Novel Patterning Technologies 2018; 1058414 (2018) https://doi.org/10.1117/12.2295145
Event: SPIE Advanced Lithography, 2018, San Jose, California, United States

Abstract

Green ethanol-developable electron beam lithography processes has great potential for reducing toxicity and future production of micro electro mechanical systems (MEMS), imprint molds, and biosensors where continued success ultimately requires improvements in existing electron beam lithography processes. This study presents progress in the development of a new positive tone biomass-based resist material with high hydrophilicity from the viewpoint of utilization of agricultural resources and advanced use of biomass for improving resolution on hardmask middlelayer. The ethanol-developable images of 70 nm line patterns were provided by the green ethanol-developable processes, instead of the common developable processes of tetramethylammonium hydroxide and organic solvents whose ecotoxicity is described by The Globally Harmonized System of Classification and Labelling of Chemicals, GHS.

Citation Download Citation

Satoshi Takei "Green ethanol-developable electron beam lithography processes using positive tone biomass resist material", Proc. SPIE 10584, Novel Patterning Technologies 2018, 1058414 (19 March 2018); https://doi.org/10.1117/12.2295145

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available