Prototype through-pellicle coherent imaging using a 30nm tabletop EUV source

Charles S. Bevis; Robert M. Karl Jr.; Bin Wang; Yuka Esashi; Michael Tanksalvala; Christina L. Porter; Peter Johnsen; Daniel E. Adams; Margaret M. Murnane; Henry C. Kapteyn

doi:10.1117/12.2307861

13 March 2018 Prototype through-pellicle coherent imaging using a 30nm tabletop EUV source

Charles S. Bevis, Robert M. Karl Jr., Bin Wang, Yuka Esashi, Michael Tanksalvala, Christina L. Porter, Peter Johnsen, Daniel E. Adams, Margaret M. Murnane, Henry C. Kapteyn

Author Affiliations +

Proceedings Volume 10585, Metrology, Inspection, and Process Control for Microlithography XXXII; 105852O (2018) https://doi.org/10.1117/12.2307861
Event: SPIE Advanced Lithography, 2018, San Jose, California, United States

Abstract

We present preliminary through-pellicle imaging using a 30nm tabletop extreme ultraviolet (EUV) coherent diffractive imaging microscope. We show that even in a non-optimized setup, this technique enables through-pellicle imaging of a sample with no detectable impact on image fidelity or resolution.

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Charles S. Bevis, Robert M. Karl Jr., Bin Wang, Yuka Esashi, Michael Tanksalvala, Christina L. Porter, Peter Johnsen, Daniel E. Adams, Margaret M. Murnane, and Henry C. Kapteyn "Prototype through-pellicle coherent imaging using a 30nm tabletop EUV source", Proc. SPIE 10585, Metrology, Inspection, and Process Control for Microlithography XXXII, 105852O (13 March 2018); https://doi.org/10.1117/12.2307861

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