Micro-scanning error correction technique for an optical micro-scanning thermal microscope imaging system

Mei-Jing Gao; Ai-Ling Tan; Ming Yang; Jie Xu; Zhen-Long Zu; Jing-Yuan Wang

doi:10.1117/12.2282762

12 January 2018 Micro-scanning error correction technique for an optical micro-scanning thermal microscope imaging system

Mei-Jing Gao, Ai-Ling Tan, Ming Yang, Jie Xu, Zhen-Long Zu, Jing-Yuan Wang

Author Affiliations +

Proceedings Volume 10620, 2017 International Conference on Optical Instruments and Technology: Optoelectronic Imaging/Spectroscopy and Signal Processing Technology; 106200F (2018) https://doi.org/10.1117/12.2282762
Event: International Conference on Optical Instruments and Technology 2017, 2017, Beijing, China

Abstract

With optical micro-scanning technology, the spatial resolution of the thermal microscope imaging system can be increased without reducing the size of the detector unit or increasing the detector dimensions. Due to optical micro-scanning error, the four low-resolution images collected by micro-scanning thermal micro- scope imaging system are not standard down-sampled images. The reconstructed image quality is degraded by the direct image interpolation with error, which influences the performance of the system. Therefore, the technique to reduce the system micro-scanning error need to be studied. Based on micro-scanning technology and combined with new edge directed interpolation(NEDI) algorithm, an error correction technique for the micro-scanning instrument is proposed. Simulations and experiments show that the proposed technique can reduce the optical micro-scanning error, improve the imaging effect of the system and improve the systems spatial resolution. It can be applied to other electro-optical imaging systems to improve their resolution.

Citation Download Citation

Mei-Jing Gao, Ai-Ling Tan, Ming Yang, Jie Xu, Zhen-Long Zu, and Jing-Yuan Wang "Micro-scanning error correction technique for an optical micro-scanning thermal microscope imaging system", Proc. SPIE 10620, 2017 International Conference on Optical Instruments and Technology: Optoelectronic Imaging/Spectroscopy and Signal Processing Technology, 106200F (12 January 2018); https://doi.org/10.1117/12.2282762

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available