Dark current reduction of InGaAs photodiode by low stress diffusion mask

Young Ho Kim; Byoung Wook Lee; Sung Yong Ko; Chang Soo Ha; Han Jung

doi:10.1117/12.2309319

23 May 2018 Dark current reduction of InGaAs photodiode by low stress diffusion mask

Young Ho Kim, Byoung Wook Lee, Sung Yong Ko, Chang Soo Ha, Han Jung

Proceedings Volume 10624, Infrared Technology and Applications XLIV; 106241T (2018) https://doi.org/10.1117/12.2309319
Event: SPIE Defense + Security, 2018, Orlando, FL, United States

Abstract

InGaAs detector for SWIR imaging is widely used for remote sensing, medical application, personal identification etc. To reduce the required power for various environmental condition, reducing dark current is crucial. The dark current of InGaAs detector is known to come from defects induced during the growth of wafers and the process to fabricate FPAs. Especially, when high temperature is applied for the diffusion of Zn to form p-type junction on n-type InP/InGaAs substrate, the diffusion barrier of Zn on the substrate experiences large expansion and add stress in the substrate. The induced stress will increase defects and increase dark current. In this work, to reduce the stress of the Zn diffusion barrier, balanced diffusion barrier with multiple layer is applied. By reducing the stress, the dark current density has reduced to below 10 nA/cm², which is suitable for low power operation.

Citation Download Citation

Young Ho Kim, Byoung Wook Lee, Sung Yong Ko, Chang Soo Ha, and Han Jung "Dark current reduction of InGaAs photodiode by low stress diffusion mask", Proc. SPIE 10624, Infrared Technology and Applications XLIV, 106241T (23 May 2018); https://doi.org/10.1117/12.2309319

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available