Silicon oxynitride based scratch resistant anti-reflective coatings

Jue Wang; Jonathan P. Bouchard; Gary A. Hart; Jean Francois Oudard; Charles A. Paulson; Paul A. Sachenik; James  J. Price

doi:10.1117/12.2303679

8 May 2018 Silicon oxynitride based scratch resistant anti-reflective coatings

Jue Wang, Jonathan P. Bouchard, Gary A. Hart, Jean Francois Oudard, Charles A. Paulson, Paul A. Sachenik, James J. Price

Author Affiliations +

Proceedings Volume 10627, Advanced Optics for Defense Applications: UV through LWIR III; 106270G (2018) https://doi.org/10.1117/12.2303679
Event: SPIE Defense + Security, 2018, Orlando, FL, United States

Abstract

Scratch resistant anti-reflective (SRAR) coatings were developed on Gorilla Glass substrates. A reactive magnetron sputtering process was employed to enable desired layer hardness and refractive index. Optical modeling was performed to determine the effective hardness of the SRAR coatings, in an effort to reduce reflectance in the visible while maintaining high scratch resistance. Scratch resistance was evaluated by using a nano-indentation test. Broadband AR coatings were realized. Potential applications of the SRAR coatings for AD optics were discussed.

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Jue Wang, Jonathan P. Bouchard, Gary A. Hart, Jean Francois Oudard, Charles A. Paulson, Paul A. Sachenik, and James J. Price "Silicon oxynitride based scratch resistant anti-reflective coatings ", Proc. SPIE 10627, Advanced Optics for Defense Applications: UV through LWIR III, 106270G (8 May 2018); https://doi.org/10.1117/12.2303679

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