Asymmetric MIM structure formation by PLD technique with metallic nitrides and its SPP excitation and waveguiding characteristics

Yasushi Oshikane; Motohiro Nakano; Hirotsugu Ogi

doi:10.1117/12.2322091

7 September 2018 Asymmetric MIM structure formation by PLD technique with metallic nitrides and its SPP excitation and waveguiding characteristics

Yasushi Oshikane, Motohiro Nakano, Hirotsugu Ogi

Author Affiliations +

Proceedings Volume 10731, Nanostructured Thin Films XI; 1073104 (2018) https://doi.org/10.1117/12.2322091
Event: SPIE Nanoscience + Engineering, 2018, San Diego, California, United States

Abstract

Experimental study and simulation analyses have been implemented in creation of an asymmetric metalinsulator- metal (MIM) on surface of glass. All of the metallic layers are composed of metallic nitrides or ceramics. Among recently reported alternative plasmonic materials, titanium nitride (TiN) and zirconium nitride (ZrN) are candidates for the metallic layers because they have plasmonic characteristic in visible region and chemically-stable. On the other hand, aluminum nitride (AlN) is used for the insulating layer because of its transparency, high refractive index, and high thermal conductivity. In this study, thin-film deposition of the ceramics is done by pulsed laser deposition (PLD) with high power UV Nd:YAG laser at 355nm. The PLD targets are hot-pressed pellets of microcrystalline powder. The asymmetric MIM structure is going to be applied to an end of optical fiber probe as an exciter of surface plasmon polariton.

Conference Presentation

Citation Download Citation

Yasushi Oshikane, Motohiro Nakano, and Hirotsugu Ogi "Asymmetric MIM structure formation by PLD technique with metallic nitrides and its SPP excitation and waveguiding characteristics", Proc. SPIE 10731, Nanostructured Thin Films XI, 1073104 (7 September 2018); https://doi.org/10.1117/12.2322091

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