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A single shot RGB Multi-wavelength Polarizing Interferometer (MPI) is proposed for measuring moving precision surfaces with micro/nano-scale structured pattern or defects. The interferometer is combined with four CMOS cameras, each with an integrated Bayer filter, to capture four color phase shifted interferograms at a single exposure time. The phase shifting mechanism is achieved by using thin film linear polarizers and birefringent quarter-wave plates. The 2π phase ambiguity range is extended by using a synthetic wavelength produced from the RGB. Measurement of step height standard samples are also presented and compared to measurement obtained by Coherence Scanning Interferometer (CSI).
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H. Muhamedsalih, S. Al-Bashir, F. Gao, X. Jiang, "Single-shot RGB polarising interferometer," Proc. SPIE 10749, Interferometry XIX, 1074909 (18 August 2018); https://doi.org/10.1117/12.2507354