Focusing optics system for the Time-resolved Molecular Optics (TMO) beam line at LCLS: surface metrology and mirror shape control of bendable mirror system

Lance Lee; Daniele Cocco; May Ling Ng; Lin Zhang; Daniel Morton

doi:10.1117/12.2323252

2 October 2018 Focusing optics system for the Time-resolved Molecular Optics (TMO) beam line at LCLS: surface metrology and mirror shape control of bendable mirror system

Lance Lee, Daniele Cocco, May Ling Ng, Lin Zhang, Daniel Morton

Author Affiliations +

Proceedings Volume 10761, Adaptive X-Ray Optics V; 1076105 (2018) https://doi.org/10.1117/12.2323252
Event: SPIE Optical Engineering + Applications, 2018, San Diego, California, United States

Abstract

Nine bendable mirrors will be installed as part of the upgrade to Linac Coherent Light Source. To achieve the target performance, accurate elliptical shapes must be generated with these focusing mirrors to an accuracy in the order of 10⁴ to 10⁵. We briefly summarize the developmental work including surface metrology via stitching and actuator characterization as well as fitting algorithm to achieve shape control of a KB developmental prototype. The height error of the centerline shape generated by the current system is in the order of 3 nm for a one meter long silicon mirror. The most important limiting factor is metrology due to environmental control.

Conference Presentation

Citation Download Citation

Lance Lee, Daniele Cocco, May Ling Ng, Lin Zhang, and Daniel Morton "Focusing optics system for the Time-resolved Molecular Optics (TMO) beam line at LCLS: surface metrology and mirror shape control of bendable mirror system", Proc. SPIE 10761, Adaptive X-Ray Optics V, 1076105 (2 October 2018); https://doi.org/10.1117/12.2323252

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