CGH and stitching technique: powerful combination enabling full-surface figure measurements of certain classes of aspheres

Chunyu Zhao

doi:10.1117/12.2502572

5 November 2018 CGH and stitching technique: powerful combination enabling full-surface figure measurements of certain classes of aspheres

Chunyu Zhao

Author Affiliations +

Proceedings Volume 10815, Optical Design and Testing VIII; 1081503 (2018) https://doi.org/10.1117/12.2502572
Event: SPIE/COS Photonics Asia, 2018, Beijing, China

Abstract

The Computer Generated Hologram is the de facto standard for measuring surface figures of aspheres interferometrically. The CGH size is limited though by the main stream fabrication technologies which were developed for mask making by semiconductor industry. The precision CGHs are predominantly made on 6”x6”x0.25” fused silica substrates, which makes it impossible to measure in full certain classes of aspheres, e.g., long cylinders, large convex aspheres, etc. However, the impossible is made possible by combining the CGH and the stitching technique which was first developed for measuring large flats. In this paper, specifics on implementing this metrology approach are discussed, and examples are presented to demonstrate its effectiveness.

Citation Download Citation

Chunyu Zhao "CGH and stitching technique: powerful combination enabling full-surface figure measurements of certain classes of aspheres", Proc. SPIE 10815, Optical Design and Testing VIII, 1081503 (5 November 2018); https://doi.org/10.1117/12.2502572

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