Dimensional measurement of internal profile using the optical caliper

Lianhua Jin; Nobuto Miyatsu; Eiichi Kondoh; Bernard Gelloz; Naobumi Kanazawa; Toru Yoshizawa

doi:10.1117/12.2501027

2 November 2018 Dimensional measurement of internal profile using the optical caliper

Lianhua Jin, Nobuto Miyatsu, Eiichi Kondoh, Bernard Gelloz, Naobumi Kanazawa, Toru Yoshizawa

Proceedings Volume 10819, Optical Metrology and Inspection for Industrial Applications V; 108190K (2018) https://doi.org/10.1117/12.2501027
Event: SPIE/COS Photonics Asia, 2018, Beijing, China

Abstract

Dimensional measurement of internal profile is conventionally performed mechanically with instruments like vernier calipers. Here, we cope with the measurement by using an optical caliper. The caliper consists of a semiconductor laser, a right conical mirror, a lens system, and an image sensor. The concept of the measurement approach is intersecting the object with a disk light sheet, collecting the cross-sectional profile image with an image sensor, and extracting dimensions of the profile. Example of practical measurement is presented.

Citation Download Citation

Lianhua Jin, Nobuto Miyatsu, Eiichi Kondoh, Bernard Gelloz, Naobumi Kanazawa, and Toru Yoshizawa "Dimensional measurement of internal profile using the optical caliper", Proc. SPIE 10819, Optical Metrology and Inspection for Industrial Applications V, 108190K (2 November 2018); https://doi.org/10.1117/12.2501027

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