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2 November 2018 Precision measurement of specular spherical surfaces based on monoscopic phase measuring deflectometry
Zhenqi Niu, Xiangchao Zhang, Xueyang Xu, Yifan Zhu, Shaoliang Li, Wanliang Zhao
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Proceedings Volume 10819, Optical Metrology and Inspection for Industrial Applications V; 1081912 (2018) https://doi.org/10.1117/12.2500767
Event: SPIE/COS Photonics Asia, 2018, Beijing, China
Abstract
In recent years, the measurement of specular aspheric surface has attracted intensive attention in precision engineering. Phase measuring deflectometry is a powerful measuring technique, which could accurately measure specular surfaces. The software configurable optical test system and a four step phase shifting approach are applied to obtain the normal vectors of the measured surface. The geometric parameters are recalculated by optimization to improve the calibration accuracy. Then the surface is reconstructed using a optimization algorithm. The configuration parameters should be set according to specific surface shapes and measuring conditions. Numerical experiments demonstrate that good performance can be achieved using this method.
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Zhenqi Niu, Xiangchao Zhang, Xueyang Xu, Yifan Zhu, Shaoliang Li, and Wanliang Zhao "Precision measurement of specular spherical surfaces based on monoscopic phase measuring deflectometry", Proc. SPIE 10819, Optical Metrology and Inspection for Industrial Applications V, 1081912 (2 November 2018); https://doi.org/10.1117/12.2500767
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KEYWORDS
Deflectometry
Calibration
Precision measurement
Reconstruction algorithms
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