Optical free form surface metrology in adaptive polarized interferometry

Lei Zhang; Sheng Zhou; Jingsong Li; Benli Yu

doi:10.1117/12.2508395

18 January 2019 Optical free form surface metrology in adaptive polarized interferometry

Lei Zhang, Sheng Zhou, Jingsong Li, Benli Yu

Proceedings Volume 10839, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment; 108391S (2019) https://doi.org/10.1117/12.2508395
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

An adaptive polarized interferometer is proposed for optical free form surfaces metrology without auxiliary devices such as the wavefront sensors and deflectometry systems for deformable mirror (DM) monitoring. In this method, the DM surface monitoring and free form surface measurement are achieved simultaneously in only one interferometer by the polarizing design. The polarizing design divide the interferometer into two partial common path interferometric system, which provide the null test for tested free form surface and non-null test for the DM surface. The final figure error of the free form surface is extracted by ray tracing. Experiments proving the feasibility of this interferometer is shown.

Citation Download Citation

Lei Zhang, Sheng Zhou, Jingsong Li, and Benli Yu "Optical free form surface metrology in adaptive polarized interferometry", Proc. SPIE 10839, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 108391S (18 January 2019); https://doi.org/10.1117/12.2508395

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available