Sand erosion durability of protective SiC thin film deposited by magnetron sputtering in the middle infrared bands

Tianxing Zhang; Jun Xue; Guangzong He

doi:10.1117/12.2505337

12 December 2018 Sand erosion durability of protective SiC thin film deposited by magnetron sputtering in the middle infrared bands

Tianxing Zhang, Jun Xue, Guangzong He

Author Affiliations +

Proceedings Volume 10847, Optical Precision Manufacturing, Testing, and Applications; 108470L (2018) https://doi.org/10.1117/12.2505337
Event: International Symposium on Optoelectronic Technology and Application 2018, 2018, Beijing, China

Abstract

Sand erosion durability of amorphous hydrogenated(a-SiC:H) and non-hydrogenated (a-SiC) Silicon-carbon thin films deposited by direct current(DC) magnetron sputtering on the crystal Silicon have been investigated in this paper. A well calculated simulations indicate that thin film perform processing outstanding sand erosion durability with higher hardness, resulting a promoted processing in the deposition of SiC. The deposition conditions such as gas pressure, sputtering power and substrate bias that all affects the properties of the thin film ultimately, which was tested by Fourier Transform Infrared Spectroscopy(FTIR), Universal Mechanical Tester(UMT) and White Light Interferometer(WLI). The sand erosion test reveals a-SiC thin film has an advantage of mechanical property compared to a SiC:H and DLC coating according to the least impact cracks on its surface, demonstrating the previous calculated simulations strongly.

Citation Download Citation

Tianxing Zhang, Jun Xue, and Guangzong He "Sand erosion durability of protective SiC thin film deposited by magnetron sputtering in the middle infrared bands", Proc. SPIE 10847, Optical Precision Manufacturing, Testing, and Applications, 108470L (12 December 2018); https://doi.org/10.1117/12.2505337

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