Demonstration of uniform and reliable GaN p-i-p-i-n separate-absorption and multiplication ultraviolet avalanche photodiode arrays with large detection area

Mi-Hee Ji; Hoon Jeong; Marzieh Bakhtiary-Noodeh; Shyh-Chiang Shen; Theeradetch Detchprohm; Ashok K. Sood; P. Parminder Ghuman; Sachidananda Babu; Nibir K. Dhar; Jay Lewis; Russell D. Dupuis

doi:10.1117/12.2507880

1 March 2019 Demonstration of uniform and reliable GaN p-i-p-i-n separate-absorption and multiplication ultraviolet avalanche photodiode arrays with large detection area

Mi-Hee Ji, Hoon Jeong, Marzieh Bakhtiary-Noodeh, Shyh-Chiang Shen, Theeradetch Detchprohm, Ashok K. Sood, P. Parminder Ghuman, Sachidananda Babu, Nibir K. Dhar, Jay Lewis, Russell D. Dupuis

Author Affiliations +

Proceedings Volume 10918, Gallium Nitride Materials and Devices XIV; 1091814 (2019) https://doi.org/10.1117/12.2507880
Event: SPIE OPTO, 2019, San Francisco, California, United States

Abstract

Front-illuminated GaN p-i-p-i-n separate-absorption and multiplication avalanche photodiode (SAM-APD) epitaxial structures were grown by metalorganic chemical vapor deposition (MOCVD) on n-type bulk GaN substrates and fabricated into 4×4 arrays with a large detection area of 100×100 μm². The SAM-APD array showed a uniform distribution of dark current density of J_Dark<(5.1±0.8)×10^-8 A/cm² at reverse bias (V_R) of 44 V except for two of them. In addition, the average onset points of breakdown voltages (V_BR) of the SAM-APD array was 73.1±0.21 V, and no microplasmas were visually observed after multiple times I-V scans.

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Mi-Hee Ji, Hoon Jeong, Marzieh Bakhtiary-Noodeh, Shyh-Chiang Shen, Theeradetch Detchprohm, Ashok K. Sood, P. Parminder Ghuman, Sachidananda Babu, Nibir K. Dhar, Jay Lewis, and Russell D. Dupuis "Demonstration of uniform and reliable GaN p-i-p-i-n separate-absorption and multiplication ultraviolet avalanche photodiode arrays with large detection area", Proc. SPIE 10918, Gallium Nitride Materials and Devices XIV, 1091814 (1 March 2019); https://doi.org/10.1117/12.2507880

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