Modeling of novel resist technologies

Luke Long; Andrew R. Neureuther; Patrick P. Naulleau

doi:10.1117/12.2515144

25 March 2019 Modeling of novel resist technologies

Luke Long, Andrew R. Neureuther, Patrick P. Naulleau

Proceedings Volume 10960, Advances in Patterning Materials and Processes XXXVI; 1096011 (2019) https://doi.org/10.1117/12.2515144
Event: SPIE Advanced Lithography, 2019, San Jose, California, United States

Abstract

In response to the difficulties posed by the resolution, line edge roughness, sensitivity (RLS) trade-off to traditional chemically amplified resist (CAR) systems used for extreme ultraviolet lithography, a number of novel resist technologies have been proposed. In this paper, the effect of quencher loading on three resist technologies is analyzed via an error propagation-based resist simulator. In order of increasing novelty as well as complexity, they are: conventional CAR with quencher, CAR with photodecomposable base, and PSCAR 2.0, a CAR system with photodecomposable base as well as an EUV-activated UV-sensitive resist component. Simulation finds the more complicated resist systems trade in an increase in resist stochastics for improved deprotection slopes, yielding a net benefit in terms of line width roughness.

Conference Presentation

Citation Download Citation

Luke Long, Andrew R. Neureuther, and Patrick P. Naulleau "Modeling of novel resist technologies", Proc. SPIE 10960, Advances in Patterning Materials and Processes XXXVI, 1096011 (25 March 2019); https://doi.org/10.1117/12.2515144

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available