High frequency guided wave defect imaging in monocrystalline silicon wafers

Mathieu Simon; Bernard Masserey; Jean-Luc Robyr; Paul Fromme

doi:10.1117/12.2513675

1 April 2019 High frequency guided wave defect imaging in monocrystalline silicon wafers

Mathieu Simon, Bernard Masserey, Jean-Luc Robyr, Paul Fromme

Proceedings Volume 10972, Health Monitoring of Structural and Biological Systems XIII; 1097206 (2019) https://doi.org/10.1117/12.2513675
Event: SPIE Smart Structures + Nondestructive Evaluation, 2019, Denver, Colorado, United States

Abstract

Micro-cracks can be induced in thin monocrystalline silicon wafers during the manufacture of solar panels. High frequency guided waves allow for the monitoring of wafers and characterization of defects. Selective excitation of the first anti-symmetric A₀ guided wave mode was achieved experimentally using a custom-made wedge transducer. The Lamb wave scattered field in the vicinity of artificial defects was measured using a noncontact laser interferometer. The surface extent of the shallow defects varying in size from 30 μm to 100 μm was characterized using an optical microscope. The characteristics of the scattered wave field were correlated to the defect size and the detection sensitivity was discussed.

Citation Download Citation

Mathieu Simon, Bernard Masserey, Jean-Luc Robyr, and Paul Fromme "High frequency guided wave defect imaging in monocrystalline silicon wafers ", Proc. SPIE 10972, Health Monitoring of Structural and Biological Systems XIII, 1097206 (1 April 2019); https://doi.org/10.1117/12.2513675

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