Tight pitch compound semiconductor SPAD arrays (Conference Presentation)

Eric S. Harmon; Robert Hirosky

doi:10.1117/12.2520535

14 May 2019 Tight pitch compound semiconductor SPAD arrays (Conference Presentation)

Eric S. Harmon, Robert Hirosky

Proceedings Volume 10978, Advanced Photon Counting Techniques XIII; 109780K (2019) https://doi.org/10.1117/12.2520535
Event: SPIE Defense + Commercial Sensing, 2019, Baltimore, MD, United States

Abstract

Single photon avalanche diode arrays have achieved extraordinary performance and are beginning to replace vacuum tube photomultipliers in almost every application. While silicon based single photon avalanche diode arrays are a rapidly maturing technology, similar arrays in compound semiconductors have met with only limited success. This is partly due to the intrinsic high defect densities in compound semiconductors and partly due to the immaturity of the fabrication techniques available. Newly developed planar processing technologies hold the potential to substantially improve the performance of compound semiconductor SPAD arrays, including decreasing dark count rates, increasing single photon detection efficiencies, and increasing dynamic range. These new techniques have been applied to GaInP SPAD arrays, enabling the SPAD array pitch to be decreased to five microns and 40,000 SPADs/mm. The performance characteristics of these GaInP SPAD arrays will be described.

Conference Presentation

Citation Download Citation

Eric S. Harmon and Robert Hirosky "Tight pitch compound semiconductor SPAD arrays (Conference Presentation)", Proc. SPIE 10978, Advanced Photon Counting Techniques XIII, 109780K (14 May 2019); https://doi.org/10.1117/12.2520535

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available