In-situ measurement of aspherics with sub-aperture deflectometry for precision optical manufacturing

Xiangchao Zhang; Xueyang Xu; Zhenqi Niu; Shaoliang Li; Wanliang Zhao

doi:10.1117/12.2519828

13 May 2019 In-situ measurement of aspherics with sub-aperture deflectometry for precision optical manufacturing

Xiangchao Zhang, Xueyang Xu, Zhenqi Niu, Shaoliang Li, Wanliang Zhao

Proceedings Volume 10991, Dimensional Optical Metrology and Inspection for Practical Applications VIII; 1099105 (2019) https://doi.org/10.1117/12.2519828
Event: SPIE Defense + Commercial Sensing, 2019, Baltimore, MD, United States

Abstract

The measurement of aspheric optics has attracted intensive attention in precision engineering, and efficient in-situ measurement technologies are required urgently. Phase measuring deflectometry is a powerful measuring method for complex specular surfaces. In this paper, an in-situ measurement method is developed based on the sub-aperture deflectometry. A complete measuring procedure is developed, including initial calibration, self-adaptive calibration, route planning, imaging acquisition, phase retrieval, gradient calculation, surface reconstruction and sub-aperture stitching. Several key points concerning the sub-aperture measurement are investigated, and effective solutions are proposed to balance the measuring accuracy and aperture, to overcome the height/slope ambiguity and to eliminate the stitching errors caused by point sampling and measuring errors. The measuring flexibility and stability can be greatly improved compared to the existing SCOTS measuring approach.

Citation Download Citation

Xiangchao Zhang, Xueyang Xu, Zhenqi Niu, Shaoliang Li, and Wanliang Zhao "In-situ measurement of aspherics with sub-aperture deflectometry for precision optical manufacturing", Proc. SPIE 10991, Dimensional Optical Metrology and Inspection for Practical Applications VIII, 1099105 (13 May 2019); https://doi.org/10.1117/12.2519828

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
6 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Deflectometry

Aspheric lenses

Calibration

Optics manufacturing

Manufacturing

Optical testing

RELATED CONTENT

Extension of measurement area of stereo deflectometry
Proceedings of SPIE (November 19 2021)

Calibration of z axis linearity for arbitrary optical topography measuring...
Proceedings of SPIE (June 22 2015)

Asphere cross testing: an exercise in uncertainty estimation
Proceedings of SPIE (October 16 2017)

Aspects Of Manufacturing Grazing Incidence X-Ray Mirrors
Proceedings of SPIE (November 03 1986)

Manufacturing and testing an 8.3-m astronomical mirror
Proceedings of SPIE (November 11 1999)

Test procedures for severely aspheric optics
Proceedings of SPIE (August 19 1996)

A best fit sphere definition capable of reducing dynamic range...
Proceedings of SPIE (November 09 2010)

Subscribe to Digital Library

Receive Erratum Email Alert

Keywords/Phrases

Search In:

Publication Years