Paper
15 March 2019 Investigation of technological operations for manufacturing 3D micro-assemblies with embedded elements
Author Affiliations +
Proceedings Volume 11022, International Conference on Micro- and Nano-Electronics 2018; 110221W (2019) https://doi.org/10.1117/12.2521797
Event: The International Conference on Micro- and Nano-Electronics 2018, 2018, Zvenigorod, Russian Federation
Abstract
The internal mounting technology is the mounting of open-dies in a functional radio-electronic module substrate structure. This method does not require the microcircuits packaging, since the package task carry out the microelectronic product substrate. As a working surface for a microelectronic product today we have a huge selection of materials. For example, to produce flexible boards, polymer materials such as polyimides are actively used. That material is characterized by wide regulation possibilities of composition, structure and properties. The internal mounting technology implies the open-dies embedding into the polymer material, followed by etching to the open-die contact pad (CP), and the added ability to integrate 3D design will significantly improve the technology in many parameters. In addition, flexible materials allow the development of complex-shaped micro-assemblies, which is one of the important advantages in a powerful products development and their subsequent installation in hard-to-reach spots.
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. Kruchinin and S. Timoshenkov "Investigation of technological operations for manufacturing 3D micro-assemblies with embedded elements", Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221W (15 March 2019); https://doi.org/10.1117/12.2521797
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KEYWORDS
Polymers

Etching

Adhesives

Manufacturing

Dielectrics

Silicon

Plasma etching

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