Paper
8 July 2019 Oblique incidence reflectance of resonators based on suspended two-dimensional membranes
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Proceedings Volume 11064, Tenth International Conference on Thin Film Physics and Applications (TFPA 2019); 110640W (2019) https://doi.org/10.1117/12.2539955
Event: Pacific Rim Laser Damage 2019 and Thin Film Physics and Applications 2019, 2019, Qingdao, China
Abstract
Mechanical resonators based on two-dimensional materials have gained attention for their interesting optical and mechanical properties, which translate into versatile applications such as ultrasensitive force detection and pressure sensing. Optical reflectometry is a technique of choice to measure the flexural vibrations of these resonators. The latter consists in sending normally incident monochromatic light on the resonator and measuring the intensity of reflected light, which varies as the distance d between the resonator and a nearby mirror varies. In this work we consider resonators based on suspended membranes of graphene, molybdenum disulfide and tungsten diselenide, and theoretically investigate the dependence of the reflectance R(d) of the resonator on the angle of incidence θ of the probing light. The optical response of these membranes is accounted for by their complex refractive indices. For s-polarized light, we find that R oscillates as a function of d with an amplitude that increases as theta increases. These results may help enhance the optical readout accuracy of these two-dimensional resonators.
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Wenjing Mao, Chen Yang, Heng Lu, Jun Lu, Fengnan Chen, Lin Wan, Ying Yan, and Joel Moser "Oblique incidence reflectance of resonators based on suspended two-dimensional membranes", Proc. SPIE 11064, Tenth International Conference on Thin Film Physics and Applications (TFPA 2019), 110640W (8 July 2019); https://doi.org/10.1117/12.2539955
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KEYWORDS
Resonators

Reflectivity

Oblique incidence reflectance

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