Robust and objective automatic optical surface inspection using modulated dark field phasing illumination

Heejoo Choi; John Kam; Joel D. Berkson; Logan R. Graves; Huang Lei; Dae Wook Kim

doi:10.1117/12.2529869

3 September 2019 Robust and objective automatic optical surface inspection using modulated dark field phasing illumination

Heejoo Choi, John Kam, Joel D. Berkson, Logan R. Graves, Huang Lei, Dae Wook Kim

Author Affiliations +

Proceedings Volume 11102, Applied Optical Metrology III; 1110207 (2019) https://doi.org/10.1117/12.2529869
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States

Abstract

Dark field illumination (DFI) is an elegant inspection technique sometimes used to detect particles on a specular surface. However, traditional DFI struggles with repeatability, limiting its applications in automated inspection. We present an improvement to DFI by introducing a modulated dark field illumination (MDFI) that utilizes the phase rather than the intensity in the detection of defects. For modulated dark field illumination (MDFI), the phase-based information is independent from the reflectance of the surface, but has a higher sensitivity to the light scattered from a defect than DFI. As a result, we obtain a robust computational image process method that is insensitive to the environment and provides clearly defined defect information. In order to extend the application to industry, the instantaneous MDFI systems were developed and validated.

Conference Presentation

Citation Download Citation

Heejoo Choi, John Kam, Joel D. Berkson, Logan R. Graves, Huang Lei, and Dae Wook Kim "Robust and objective automatic optical surface inspection using modulated dark field phasing illumination", Proc. SPIE 11102, Applied Optical Metrology III, 1110207 (3 September 2019); https://doi.org/10.1117/12.2529869

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