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10 March 2020 High-resolution biopatterning with beam pen lithography (Conference Presentation)
Andrey Ivankin, Jared Magoline, Shaowei Ding, William Hutson
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Proceedings Volume 11294, Emerging Digital Micromirror Device Based Systems and Applications XII; 1129406 (2020) https://doi.org/10.1117/12.2547938
Event: SPIE OPTO, 2020, San Francisco, California, United States
Abstract
We demonstrate high-throughput, maskless patterning of biomolecules over centimeter scale areas with a diffraction-unlimited, sub-0.5 µm resolution using beam pen lithography (BPL), a technique employing a massively parallel array of near-field scanning probes. By integrating a digital micromirror device into the light path and aligning the grid of micromirrors to the grid of probes, we achieve independent actuation of >50,000 probes, enabling arbitrary patterning with high uniformity over the entire projection area.
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Andrey Ivankin, Jared Magoline, Shaowei Ding, and William Hutson "High-resolution biopatterning with beam pen lithography (Conference Presentation)", Proc. SPIE 11294, Emerging Digital Micromirror Device Based Systems and Applications XII, 1129406 (10 March 2020); https://doi.org/10.1117/12.2547938
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KEYWORDS
Lithography
Optical lithography
Digital micromirror devices
Cell biology
Deep ultraviolet
Lithographic illumination
Molecular biology
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