A new excimer lamp model of Institute of High Current Electronics

Victor F Tarasenko; Sergey M. Avdeev; Victor A. Panarin; Victor S. Skakun; Eduard A. Sosnin

doi:10.1117/12.2541530

11 December 2019 A new excimer lamp model of Institute of High Current Electronics

Victor F Tarasenko, Sergey M. Avdeev, Victor A. Panarin, Victor S. Skakun, Eduard A. Sosnin

Proceedings Volume 11322, XIV International Conference on Pulsed Lasers and Laser Applications; 1132227 (2019) https://doi.org/10.1117/12.2541530
Event: XIV International Conference on Pulsed Lasers and Laser Applications (AMPL-2019), 2019, Tomsk, Russian Federation

Abstract

A new models of Xe₂-excilamp (with maximum of radiation spectra at 172 nm) developed in Optical Radiation Laboratory of High Current Electronics Institute are presented. The task of creating a lamp with the most simple design embodiment was solved. The bulb of such an excilamp was made from a single quartz tube with a diameter of 22 mm and a length of 12 cm. The length of the discharge region was 4 cm. The lamp was supplied with voltage pulses from a generator of 2 μs with a repetition frequency up to 100 kHz. A radiant exitance of 3.5 mW/cm² has been obtained. This value has not changed after 2400 hours of excilamp operation. The report will also describe other designs of Xe₂-excilamps.

Citation Download Citation

Victor F Tarasenko, Sergey M. Avdeev, Victor A. Panarin, Victor S. Skakun, and Eduard A. Sosnin "A new excimer lamp model of Institute of High Current Electronics", Proc. SPIE 11322, XIV International Conference on Pulsed Lasers and Laser Applications, 1132227 (11 December 2019); https://doi.org/10.1117/12.2541530

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