Grazing incidence interferometry for testing rough aspherics: experimental results and data analysis

S. Rothau; K. Mantel; N. Lindlein

doi:10.1117/12.2555082

1 April 2020 Grazing incidence interferometry for testing rough aspherics: experimental results and data analysis

S. Rothau, K. Mantel, N. Lindlein

Proceedings Volume 11352, Optics and Photonics for Advanced Dimensional Metrology; 113520H (2020) https://doi.org/10.1117/12.2555082
Event: SPIE Photonics Europe, 2020, Online Only

Abstract

In the past, grazing incidence interferometry has been applied to plane, cylindrical, acylindrical and general rod-like surfaces using diffractive beam splitters. Here, we demonstrate that also rough convex steep rotationally symmetric aspherics can be measured along one meridian in a single step using diffractive beam splitters and phase shifting techniques. The measurement of rough surfaces is possible i.e. without the need to polish the surfaces, due to the large effective wavelength (here about 10μm) of the test. The whole surface can be measured by rotating it stepwise around its symmetry axis and measuring successive small meridian regions. These meridian regions have to be stitched together to get the whole surface. Besides the presentation of the measurement principle, simulation results of the procedure for aspherical specimens are given. The corresponding experimental setup with discussion of the measured phase distributions is presented and the misalignment analysis is performed for the special case of spherical objects under test.

Citation Download Citation

S. Rothau, K. Mantel, and N. Lindlein "Grazing incidence interferometry for testing rough aspherics: experimental results and data analysis", Proc. SPIE 11352, Optics and Photonics for Advanced Dimensional Metrology, 113520H (1 April 2020); https://doi.org/10.1117/12.2555082

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KEYWORDS

Axicons

Phase measurement

Aspheric lenses

Grazing incidence

Diffractive optical elements

Spherical lenses

Interferometry

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