Measurements of image quality and surface shape of microlens arrays for Shack-Hartmann wavefront sensors

Koki Terao; Masayuki Akiyama; Shin Oya

doi:10.1117/12.2562199

13 December 2020 Measurements of image quality and surface shape of microlens arrays for Shack-Hartmann wavefront sensors

Koki Terao, Masayuki Akiyama, Shin Oya

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Proceedings Volume 11448, Adaptive Optics Systems VII; 1144865 (2020) https://doi.org/10.1117/12.2562199
Event: SPIE Astronomical Telescopes + Instrumentation, 2020, Online Only

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Abstract

We present the results of the evaluation of the ensquared energy of eight commercially available and custom made Microlens arrays (MLAs) with different focal length Plano-Convex microlens. The highest efficiency is observed with a 300 μm pitch MLA with no AR-coating and square apertures, which show 79% light ensquared within the first dark ring compared to the uniform illumination of the sub-aperture. To quantitatively explain the observed difference in the ensquared energy, we measured the surface shape of these MLAs using a laser interferometer. The comparison between the ensquared energy and the surface shape inferred that the lower ensquared energy of a MLA than the other MLAs with same 300 μm pitch can be explained with the deviation of the ideal shape at the outer part of the each lens.

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Koki Terao, Masayuki Akiyama, and Shin Oya "Measurements of image quality and surface shape of microlens arrays for Shack-Hartmann wavefront sensors", Proc. SPIE 11448, Adaptive Optics Systems VII, 1144865 (13 December 2020); https://doi.org/10.1117/12.2562199

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