Paper
8 July 2020 Mid spatial frequency error prevention strategies for the grinding process
Author Affiliations +
Proceedings Volume 11478, Seventh European Seminar on Precision Optics Manufacturing; 114780E (2020) https://doi.org/10.1117/12.2565261
Event: Seventh European Seminar on Precision Optics Manufacturing, 2020, Teisnach, Germany
Abstract
This research is focused on the link between manufacturing parameters and the resulting mid-spatial frequency error in the manufacturing process of precision optics. The goal is to understand the generation mechanisms of mid-spatial frequency errors and avoid their appearance in the manufacturing process. Also, a simulation which is able to predict the resulting mid spatial frequency error from a manufacturing process is desired.
© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mario Pohl, Rainer Boerret, Olga Kukso, and Rolf Rascher "Mid spatial frequency error prevention strategies for the grinding process", Proc. SPIE 11478, Seventh European Seminar on Precision Optics Manufacturing, 114780E (8 July 2020); https://doi.org/10.1117/12.2565261
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KEYWORDS
Polishing

Spatial frequencies

Manufacturing

Surface finishing

Optics manufacturing

Precision optics

Scanning probe microscopy

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