Observation of pressure distribution between tool and surface in different polishing situations

Michael F. Benisch; Oliver Fähnle; Rolf Rascher

doi:10.1117/12.2567885

20 August 2020 Observation of pressure distribution between tool and surface in different polishing situations

Michael F. Benisch, Oliver Fähnle, Rolf Rascher

Proceedings Volume 11487, Optical Manufacturing and Testing XIII; 1148704 (2020) https://doi.org/10.1117/12.2567885
Event: SPIE Optical Engineering + Applications, 2020, Online Only

Abstract

Pressure is a relevant parameter in the polishing of components according to the Preston equation.^{1, 2} Preliminary investigations have shown that the pressure can vary with inclined position and different polishing pads. It is not constant with regard to its distribution in the contact area between polishing pad and glass surface. In this publication, the pressure distribution during the polishing of glass components is analyzed. For the measurement of the pressure distribution a pressure sensitive foil is used.

Conference Presentation

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Michael F. Benisch, Oliver Fähnle, and Rolf Rascher "Observation of pressure distribution between tool and surface in different polishing situations", Proc. SPIE 11487, Optical Manufacturing and Testing XIII, 1148704 (20 August 2020); https://doi.org/10.1117/12.2567885

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