Paper
8 January 1990 Development And Evaluation Of CoSi2 Schottky Barrier Infrared Detectors
J. Kurianski, J. Vermeiren, C. Claeys, W. Stessens, K. Maex, R. De Keersmaecker
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Abstract
Silicides used commonly for Schottky barrier infrared (IR) imaging arrays, are those of platinum and palladium. Recently good results have also been reported for IR sensitive composed Pt-Ir silicides. The uniformity of the response over large detector arrays and the VLSI fabrication compatibility are their main advantages, as compared to non Schottky type detectors. This paper presents theoretical as well as experimental data on the cobalt silicide as used in Schottky detectors for the short wavelength IR (SWIR) band. The big advantage of a CoSi2 detector, over the conventionally used silicides, is its higher operating temperature allowing passive cooling in space remote sensing applications.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. Kurianski, J. Vermeiren, C. Claeys, W. Stessens, K. Maex, and R. De Keersmaecker "Development And Evaluation Of CoSi2 Schottky Barrier Infrared Detectors", Proc. SPIE 1157, Infrared Technology XV, (8 January 1990); https://doi.org/10.1117/12.978591
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Cited by 5 scholarly publications.
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KEYWORDS
Sensors

Infrared sensors

Quantum efficiency

Infrared imaging

Infrared detectors

Cobalt

Infrared radiation

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