Experimental validation of particle impact on thermo-mechanical behavior of EUV pellicle

Yong Ju Jang; Seong Ju Wi; Chang Soo Kim; Ha Neul Kim; Jinho Ahn

doi:10.1117/12.2587398

22 February 2021 Experimental validation of particle impact on thermo-mechanical behavior of EUV pellicle

Yong Ju Jang, Seong Ju Wi, Chang Soo Kim, Ha Neul Kim, Jinho Ahn

Proceedings Volume 11609, Extreme Ultraviolet (EUV) Lithography XII; 116091X (2021) https://doi.org/10.1117/12.2587398
Event: SPIE Advanced Lithography, 2021, Online Only

Conference Poster

Abstract

Possibility of localized thermal gradient near particles on pellicle surface during EUV-induced heat load was investigated. Optical/thermo-mechanical simulations were performed to calculate EUV/UV absorbance and thermal stress distribution of a particle contaminated pellicle. Ru/SiNx double-stack pellicles were fabricated and contaminated by particles of Ti, C, Fe which are the main contamination species in a EUV scanner. As a result, a localized thermal stress was induced by particles and a shorter lifetime was observed for a membrane contaminated with larger particles.

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Citation Download Citation

Yong Ju Jang, Seong Ju Wi, Chang Soo Kim, Ha Neul Kim, and Jinho Ahn "Experimental validation of particle impact on thermo-mechanical behavior of EUV pellicle", Proc. SPIE 11609, Extreme Ultraviolet (EUV) Lithography XII, 116091X (22 February 2021); https://doi.org/10.1117/12.2587398

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