Latent image characterization by spectroscopic reflectometry in the extreme ultraviolet

Sophia Schröder; Lukas Bahrenberg; Bernhard Lüttgenau; Sven Glabisch; Serhiy Danylyuk; Sascha Brose; Jochen Stollenwerk; Peter Loosen

doi:10.1117/12.2583830

22 February 2021 Latent image characterization by spectroscopic reflectometry in the extreme ultraviolet

Sophia Schröder, Lukas Bahrenberg, Bernhard Lüttgenau, Sven Glabisch, Serhiy Danylyuk, Sascha Brose, Jochen Stollenwerk, Peter Loosen

Author Affiliations +

Proceedings Volume 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV; 116111M (2021) https://doi.org/10.1117/12.2583830
Event: SPIE Advanced Lithography, 2021, Online Only

Abstract

The authors present latent image characterization in photoresists by means of extreme ultraviolet (EUV) spectroscopic reflectometry. The optical constants of photoresists before and after exposure are measured in the EUV spectral range. Latent images are investigated in the form of periodic line gratings. The investigation is performed by the analysis of spectroscopic reflectance curves in the wavelength range from 5 nm to 20 nm at grazing incidence angles. Through an analysis of the reflectance curves based on rigorous electromagnetic modeling, a characterization of parameters of interest of the latent image is evaluated. This includes the latent image profile, surface topography and stochastic-related parameters such as line edge roughness.

Conference Presentation

Citation Download Citation

Sophia Schröder, Lukas Bahrenberg, Bernhard Lüttgenau, Sven Glabisch, Serhiy Danylyuk, Sascha Brose, Jochen Stollenwerk, and Peter Loosen "Latent image characterization by spectroscopic reflectometry in the extreme ultraviolet", Proc. SPIE 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV, 116111M (22 February 2021); https://doi.org/10.1117/12.2583830

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available