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5 March 2021 Silicon photonic opto-mechanical ultrasound sensor for photoacoustic imaging
Wouter J. Westerveld, Md. Mahmud-Ul-Hasan, Rami Shnaiderman, Cedric Pieters, Vasilis Ntziachristos, Roelof Jansen, Xavier Rottenberg, Simone Severi, Veronique Rochus
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Proceedings Volume 11642, Photons Plus Ultrasound: Imaging and Sensing 2021; 1164223 (2021) https://doi.org/10.1117/12.2577599
Event: SPIE BiOS, 2021, Online Only
Abstract
Future applications of photo-acoustic imaging require a matrix of small (wavelength/2) and sensitive ultrasound sensors with read-out through a flexible cable. Integrated optical sensors have good prospects: small and sensitive sensors, wafer-scale fabrication, and matrix read-out via single optical fiber using on-chip optical multiplexing. We propose a new type of opto-mechanical ultrasound sensor (OMUS) in silicon photonic chip technology. By using an acoustically resonant membrane in combination with an innovative split rib-type photonic waveguide, we achieve extremely high sensitivity. We present our experimental results in the frequency range up to 30 MHz.
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Wouter J. Westerveld, Md. Mahmud-Ul-Hasan, Rami Shnaiderman, Cedric Pieters, Vasilis Ntziachristos, Roelof Jansen, Xavier Rottenberg, Simone Severi, and Veronique Rochus "Silicon photonic opto-mechanical ultrasound sensor for photoacoustic imaging", Proc. SPIE 11642, Photons Plus Ultrasound: Imaging and Sensing 2021, 1164223 (5 March 2021); https://doi.org/10.1117/12.2577599
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KEYWORDS
Sensors
Ultrasonography
Silicon photonics
Image sensors
Photoacoustic imaging
Waveguides
Optical multiplexing
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