Single-step manufacturing of high-efficiency dielectric metasurfaces and metalenses

Junsuk Rho; Gwanoho Yoon

doi:10.1117/12.2582410

5 March 2021 Single-step manufacturing of high-efficiency dielectric metasurfaces and metalenses

Junsuk Rho, Gwanoho Yoon

Proceedings Volume 11696, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIV; 116960A (2021) https://doi.org/10.1117/12.2582410
Event: SPIE OPTO, 2021, Online Only

Abstract

Dielectric metasurfaces have shown a great potential as ultrathin optical components, but practical use is still hindered by limitations of conventional nanofabrication methods. Here, we develop a highly-productive printing-based scalable nanofabrication method to manufacture dielectric metasurfaces at low cost. This method features a nanoparticle composite in which optical properties can be controlled by the content of nanoparticles, so high-efficiency metasurfaces can be fabricated by only a single step of printing without any secondary operations such as thin film deposition and etching. The feasibility of our method is also verified by realizing high-efficiency metaholograms and metalenses working in the visible and near-infrared regime.

Conference Presentation

Citation Download Citation

Junsuk Rho and Gwanoho Yoon "Single-step manufacturing of high-efficiency dielectric metasurfaces and metalenses", Proc. SPIE 11696, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIV, 116960A (5 March 2021); https://doi.org/10.1117/12.2582410

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