Optimization design of porous aerostatic bearing for full aperture rapid planar polishing machine

Mingchen Cao; Huiying Zhao; Ruiqing Xie; Shenggen Zhu; Lingyu Zhao; Jinfeng Bai; Dan Ma; Yuxuan Cao; Jianjun Chen

doi:10.1117/12.2586832

15 January 2021 Optimization design of porous aerostatic bearing for full aperture rapid planar polishing machine

Mingchen Cao, Huiying Zhao, Ruiqing Xie, Shenggen Zhu, Lingyu Zhao, Jinfeng Bai, Dan Ma, Yuxuan Cao, Jianjun Chen

Proceedings Volume 11761, Fourth International Conference on Photonics and Optical Engineering; 117611P (2021) https://doi.org/10.1117/12.2586832
Event: Fourth International Conference on Photonics and Optical Engineering, 2020, Xi'an, China

Abstract

Full aperture rapid planar polishing (RPP) equipment has been widely used in the field of optical processing, which requires high precision and stability of the polishing shaft. With high stability and sustainability of precision, the aerostatic bearing is the potential technology for RPP machine. To meet the needs of RPP machine, Fluent was used to analyze the load-bearing characteristics of high-precision aerostatic bearing. Based on the simulated results, the parameter optimization design for porous aerostatic bearing was conducted to get better load-bearing characteristics, including bearing capacity, static stiffness and gas consumption. The influence of air supply pressure, porous material thickness and film thickness on bearing characteristics were studied, and the simulation analysis was performed to get the optimal design parameters for aerostatic bearing. The simulated results show that the designed high-precision aerostatic bearing can satisfy the requirements of RPP machine.

Citation Download Citation

Mingchen Cao, Huiying Zhao, Ruiqing Xie, Shenggen Zhu, Lingyu Zhao, Jinfeng Bai, Dan Ma, Yuxuan Cao, and Jianjun Chen "Optimization design of porous aerostatic bearing for full aperture rapid planar polishing machine", Proc. SPIE 11761, Fourth International Conference on Photonics and Optical Engineering, 117611P (15 January 2021); https://doi.org/10.1117/12.2586832

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