Correlation of subsurface damage and surface roughness on ZERODUR ground surfaces by using rotation table peripheral grinding process

Antoine Leys; Tony B. Hull; Antoine Carré; Thomas Westerhoff

doi:10.1117/12.2599381

11 June 2021 Correlation of subsurface damage and surface roughness on ZERODUR ground surfaces by using rotation table peripheral grinding process

Antoine Leys, Tony B. Hull, Antoine Carré, Thomas Westerhoff

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Proceedings Volume 11852, International Conference on Space Optics — ICSO 2020; 118522I (2021) https://doi.org/10.1117/12.2599381
Event: International Conference on Space Optics — ICSO 2021, 2021, Online Only

Abstract

ZERODUR surfaces resulting from machining to spherical or aspherical forms have been investigated by visible light microscopy to identify subsurface damage (SSD). The rotation table peripheral grinding method has been used. Surface roughness (SR) of the different finished surfaces has been measured by a profilometer. We then examine the correlation between subsurface damage and roughness. This correlation allows for a precise determination and reduction of the SSD, enabling subsequent process steps such as polishing to continue with finer tool sizes resulting in a more efficient overall process.

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Antoine Leys, Tony B. Hull, Antoine Carré, and Thomas Westerhoff "Correlation of subsurface damage and surface roughness on ZERODUR ground surfaces by using rotation table peripheral grinding process", Proc. SPIE 11852, International Conference on Space Optics — ICSO 2020, 118522I (11 June 2021); https://doi.org/10.1117/12.2599381

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