Spectrally and angularly resolved instrument for light scattering metrology of optical thin-film filters

Marin Fouchier; Myriam Zerrad; Michel Lequime; Claude Amra

doi:10.1117/12.2597086

12 September 2021 Spectrally and angularly resolved instrument for light scattering metrology of optical thin-film filters

Marin Fouchier, Myriam Zerrad, Michel Lequime, Claude Amra

Author Affiliations +

Proceedings Volume 11872, Advances in Optical Thin Films VII; 118720T (2021) https://doi.org/10.1117/12.2597086
Event: SPIE Optical Systems Design, 2021, Online Only

Abstract

Optical thin-film components have known major developments over the last three decades and find now applications in many scientific fields. But it remains difficult to measure and characterize complex components. Light scattering properties are usually neglected in the characterization even though it is well-known that it can be critical for some very demanding applications where the miniaturization of optical instruments make them more sensitive to crosstalk. We present in this paper an upgraded version of a spectrally and angularly resolved scatterometer operating on a continuous spectral range from 400 to 1700 nm and reaching unprecedented levels of detection and accuracy.

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Citation Download Citation

Marin Fouchier, Myriam Zerrad, Michel Lequime, and Claude Amra "Spectrally and angularly resolved instrument for light scattering metrology of optical thin-film filters", Proc. SPIE 11872, Advances in Optical Thin Films VII, 118720T (12 September 2021); https://doi.org/10.1117/12.2597086

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