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Extreme ultraviolet laser ablation mass spectrometry (EUV LA-MS), developed at Colorado State University, uses EUV laser wavelengths instead of traditional visible lasers, allowing sub-micron ablation spot sizes while maintaining a good sensitivity for trace element analysis. In this paper, we have explored the capabilities of this device as a non-perturbative technique to measure the temperature of the laser-produced plasma after the laser interaction. Mass spectra obtained from silver, aluminium, gold and silicon samples were used to identify and quantify the ion population created. Additionally, the ionization ratios were calculated and input in a coronal ionization equilibrium model to calculate the effective temperature of the plasma after the ablation process. Temperatures ranging 1.35 to 1.84 eV were measured for the different materials, with heavier elements having lower temperatures than the lighter ones.
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