Large thickness measurement of glass plates with a spectrally resolved interferometer using two positions of a reference surface and a compensation glass

Kaining Zhang; Samuel Choi; Osami Sasaki; Songjie Luo; Takamasa Suzuki; Jixiong Pu

doi:10.1117/12.2601233

9 October 2021 Large thickness measurement of glass plates with a spectrally resolved interferometer using two positions of a reference surface and a compensation glass

Kaining Zhang, Samuel Choi, Osami Sasaki, Songjie Luo, Takamasa Suzuki, Jixiong Pu

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Proceedings Volume 11899, Optical Metrology and Inspection for Industrial Applications VIII; 118990A (2021) https://doi.org/10.1117/12.2601233
Event: SPIE/COS Photonics Asia, 2021, Nantong, JS, China

Abstract

A high resolution spectrum analyzer is required to measure a large thickness of a glass plate with a spectral resolved interferometer. In order to solve this requirement, two positions of a reference surface are used to produce short optical differences in the interference signals. Moreover, in order to reduce the dispersion effect a compensation glass is used for the measurement of the rear surface of a glass plate. Linear and nonlinear components of spectral phase distribution of the interference signal are utilized to obtain position of a reflecting surface and thickness of a dispersive medium, respectively. Experimental results show that the measurement error is less than 800 nm and 2 μm for 1 mm and 5mm-thickness glass plates, respectively.

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Kaining Zhang, Samuel Choi, Osami Sasaki, Songjie Luo, Takamasa Suzuki, and Jixiong Pu "Large thickness measurement of glass plates with a spectrally resolved interferometer using two positions of a reference surface and a compensation glass", Proc. SPIE 11899, Optical Metrology and Inspection for Industrial Applications VIII, 118990A (9 October 2021); https://doi.org/10.1117/12.2601233

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