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12 October 2021 Glass-Engraved Metasurfaces: Advancements Toward Scalable and Durable High Power Laser Optics
Nathan J. Ray, Jake Yoo, Hoang Nguyen, Michael Johnson, Eyal Feigenbaum
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Proceedings Volume 11910, Laser-Induced Damage in Optical Materials 2021; 1191018 (2021) https://doi.org/10.1117/12.2618066
Event: SPIE Laser Damage, 2021, Online Only
Abstract
We present a method for producing spatially invariant glass engraved meta-surfaces, which is scalable, has high mechanical stability, and has high laser damage durability. The process is based on dewetting a thin metal film on a glass, followed by dry etching and metal mask removal. We will present masking technology that enables deeper etching while maintaining sub-wavelength feature sizes, performance of the optimized metasurfaces as antireflective layers, mechanical stability and laser durability of the fabricated surfaces, and discuss ongoing work.
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Nathan J. Ray, Jake Yoo, Hoang Nguyen, Michael Johnson, and Eyal Feigenbaum "Glass-Engraved Metasurfaces: Advancements Toward Scalable and Durable High Power Laser Optics", Proc. SPIE 11910, Laser-Induced Damage in Optical Materials 2021, 1191018 (12 October 2021); https://doi.org/10.1117/12.2618066
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KEYWORDS
High power lasers
Laser optics
Laser induced damage
Optical components
Antireflective coatings
Dielectrics
Lithography
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