Divided-aperture dual-differential confocal microscopy

Rongji Li; Ruirui Zhang; Han Cui; Demin Xu; Han Ma; Lirong Qiu

doi:10.1117/12.2621457

14 November 2021 Divided-aperture dual-differential confocal microscopy

Rongji Li, Ruirui Zhang, Han Cui, Demin Xu, Han Ma, Lirong Qiu

Proceedings Volume 11914, SPIE Future Sensing Technologies 2021; 1191414 (2021) https://doi.org/10.1117/12.2621457
Event: SPIE Future Sensing Technologies, 2021, Online Only

Abstract

We introduced a new method called divided-aperture dual-differential confocal microscopy (DADDCM), which delivered large sensing measurement range and high axial focusing capability for profile measurement. There are three virtual pinholes, one is on the optical axis and the other two are placed either side of the optical axis. The signal from each off-axis will be processed with the on-axis one, and the processed signals are added up to acquire the axial intensity response curve with large linear sensing range. So, it can realize the large-scale non-axial fast sensing scanning with an axial focusing capability of ~2 nm and an improved linear sensing range up to 2.1 times that of divided-aperture differential confocal microscopy (DADCM). Benefiting from this large linear sensing range, a non-axial scanning imaging detection of microstructures is implemented, which leads to a high scanning speed. This method provides a new high precision and fast measurement method for the three-dimensional morphology of microstructure.

Conference Presentation

Citation Download Citation

Rongji Li, Ruirui Zhang, Han Cui, Demin Xu, Han Ma, and Lirong Qiu "Divided-aperture dual-differential confocal microscopy", Proc. SPIE 11914, SPIE Future Sensing Technologies 2021, 1191414 (14 November 2021); https://doi.org/10.1117/12.2621457

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