Multi-mJ ultrafast laser machining with flexible multi-spot patterns

Daniel Flamm; Julian Hellstern; Andreas Heimes; Felix Zimmermann; Abdolnaser Ghazagh; Jona Wohletz; Fabian Kimmich; Jonas Kleiner; Christoph Tillkorn

doi:10.1117/12.2607612

4 March 2022 Multi-mJ ultrafast laser machining with flexible multi-spot patterns

Daniel Flamm, Julian Hellstern, Andreas Heimes, Felix Zimmermann, Abdolnaser Ghazagh, Jona Wohletz, Fabian Kimmich, Jonas Kleiner, Christoph Tillkorn

Author Affiliations +

Proceedings Volume 11994, High-Power Laser Materials Processing: Applications, Diagnostics, and Systems XI; 119940K (2022) https://doi.org/10.1117/12.2607612
Event: SPIE LASE, 2022, San Francisco, California, United States

Abstract

We demonstrate how high-energy ultrafast laser sources can be used to efficiently drive well-known low-energy micro-machining applications such as surface structuring of opaque and transparent materials. The presented optical concept employs micro-lens arrays, thus standard components, as central beam splitting elements to generate multiple focal spots for parallel processing. Here, a simple and robust opto-mechanical concept enables to control the number of foci ranging from a few ten up to a few hundred spots. Throughput scaling and complete use of the industry-grade ultrafast laser platform is discussed by means of selected micro-machining examples.

Conference Presentation

Citation Download Citation

Daniel Flamm, Julian Hellstern, Andreas Heimes, Felix Zimmermann, Abdolnaser Ghazagh, Jona Wohletz, Fabian Kimmich, Jonas Kleiner, and Christoph Tillkorn "Multi-mJ ultrafast laser machining with flexible multi-spot patterns", Proc. SPIE 11994, High-Power Laser Materials Processing: Applications, Diagnostics, and Systems XI, 119940K (4 March 2022); https://doi.org/10.1117/12.2607612

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