Dense silicon-nitride PIC design and manufacturing on transparent substrate for a retinal projector evaluation

Kyllian Millard; Basile Meynard; Yann Lee; Matthias Colard; Jonathan Faugier-Tovar; Haidar Al Dujaili; Olivier Lartigue; Daivid Fowler; Elise Ghibaudo; Christophe Martinez

doi:10.1117/12.2605816

5 March 2022 Dense silicon-nitride PIC design and manufacturing on transparent substrate for a retinal projector evaluation

Kyllian Millard, Basile Meynard, Yann Lee, Matthias Colard, Jonathan Faugier-Tovar, Haidar Al Dujaili, Olivier Lartigue, Daivid Fowler, Elise Ghibaudo, Christophe Martinez

Author Affiliations +

Proceedings Volume 12004, Integrated Optics: Devices, Materials, and Technologies XXVI; 120040J (2022) https://doi.org/10.1117/12.2605816
Event: SPIE OPTO, 2022, San Francisco, California, United States

Abstract

We are developing a non-conventional retinal projector for augmented reality (AR) applications. In our concept, light at λ = 532 nm is guided in silicon-nitride (SiN) photonic integrated circuits (PICs) embedded in the lens of a pair of glasses. We use holographic elements to transmit the emissive points towards the user’s retina without using lenses. Pixels are formed in the eye using the self-focusing effect and the eye lens. The transparency of the device is an absolute requirement for our application. In this work, we present the fabrication and the characterization of our latest SiN PICs on transparent substrate. The device was fabricated by transferring the SiN PICs from a silicon to a glass substrate. We characterized the PICs and the free-space optical transmission properties of our device using in-house goniometers and a Modulation Transfer Function (MTF) setup. We found a 76% transparency at our wavelength and no image alteration. However, we measured significant waveguide propagation losses; solutions are discussed to tackle this problem. Our glass-substrate device is a major step towards a future prototype for our AR retinal projector.

Conference Presentation

Citation Download Citation

Kyllian Millard, Basile Meynard, Yann Lee, Matthias Colard, Jonathan Faugier-Tovar, Haidar Al Dujaili, Olivier Lartigue, Daivid Fowler, Elise Ghibaudo, and Christophe Martinez "Dense silicon-nitride PIC design and manufacturing on transparent substrate for a retinal projector evaluation", Proc. SPIE 12004, Integrated Optics: Devices, Materials, and Technologies XXVI, 120040J (5 March 2022); https://doi.org/10.1117/12.2605816

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